Hitachi Releases GT2000 E-Beam Metrology System
- ERiC Jay Miller
- Feb 9, 2024
- 1 min read
Hitachi High-Tech has released the GT2000, an electron beam metrology system for the semiconductor industry.
Hitachi claims the system is capable of evaluation at 100v and that is also has a new high sensitivity BSE detector and that tool-to-tool matching has been improved.
